JPH0371628U - - Google Patents
Info
- Publication number
- JPH0371628U JPH0371628U JP13233289U JP13233289U JPH0371628U JP H0371628 U JPH0371628 U JP H0371628U JP 13233289 U JP13233289 U JP 13233289U JP 13233289 U JP13233289 U JP 13233289U JP H0371628 U JPH0371628 U JP H0371628U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- container
- lid
- semiconductor material
- cradles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 4
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13233289U JPH0371628U (en]) | 1989-11-14 | 1989-11-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13233289U JPH0371628U (en]) | 1989-11-14 | 1989-11-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0371628U true JPH0371628U (en]) | 1991-07-19 |
Family
ID=31679796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13233289U Pending JPH0371628U (en]) | 1989-11-14 | 1989-11-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0371628U (en]) |
-
1989
- 1989-11-14 JP JP13233289U patent/JPH0371628U/ja active Pending
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